Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas content

ABSTRACT

A plasma etch process etches high aspect ratio openings in a dielectric film on a workpiece in a reactor having a ceiling electrode overlying the workpiece and an electrostatic chuck supporting the workpiece. The process includes injecting a polymerizing etch process gas through an annular zone of gas injection orifices in the ceiling electrode, and evacuating gas from the reactor through a pumping annulus surrounding an edge of the workpiece. The high aspect ratio openings are etched in the dielectric film with etch species derived from the etch process gas while depositing a polymer derived from the etch process gas onto the workpiece, by generating a plasma in the reactor by applying VHF source power and/or HF and/or LF bias power to the electrodes at the ceiling and/or the electrostatic chuck. The process further includes slowing the deposition rate of the polymer, minimizing etch stop and/or increasing the etch rate in a region of the workpiece typically the center by injecting oxygen or nitrogen and/or high-fluorine containing gas through gas injection orifice in the corresponding region of the ceiling electrode, and adjusting the flow rate of the oxygen or nitrogen and/or high-fluorine containing gas through the gas injection orifice to minimize the difference between profiles and etch depths at the workpiece center and the workpiece periphery.

BACKGROUND OF THE INVENTION

Fabrication of integrated circuits with feature sizes on the order ofnanometers requires etch processes that are extremely uniform across theentire surface of a semiconductor wafer, typically about 300 millimetersin diameter. Such uniform etch processes are typically realized in aplasma etch reactor such as a capacitively coupled plasma reactor withan overhead electrode having an extremely high aspect ratio (e.g., anelectrode-to-wafer gap of only 2.5 cm for a 300 mm wafer). The etchprocess gas includes a gas of the type that forms a protective polymerlayer over photoresist or other thin film surfaces that are not to beetched, such as a fluorocarbon gas or a fluorohydrocarbon gas. Formationof such a protective polymer layer enhances etch selectivity.

Such processes exhibit a low etch rate, etch stop or taper profile at aregion typically the center of the wafer and a high etch rate or bowprofile at other region typically near the wafer periphery. Such acenter low etch rate, etch stop or taper profile has appeared to beunavoidable for a number of reasons. First, the process gas isintroduced either from the side of the wafer or over the top of thewafer. Evacuation of gas from the reactor chamber requires the gas toflow radially outwardly across the surface of the wafer, so that gasesfed to the wafer center pass over the wafer periphery before beingevacuated. Therefore, the residency time of the gas increases with waferradius, so that the minimum residency time (and hence the minimum gasdissociation) occurs at the wafer center. This effect is particularlypronounced due to the high aspect ratio of the reactor chamber. Thisaspect ratio arises from the small electrode-to-wafer gap (e.g., about 2cm) and the large wafer diameter (e.g., 300 mm). The low dissociation ofplasma species at the wafer center results in more complex (e.g., morecarbon-rich) fluorocarbon or fluorohydrocarbon plasma species at thewafer center, which tend to etch dielectric material on the wafer moreslowly while depositing etch-stopping polymer more quickly, therebydepressing the etch rate at the wafer center. In contrast, the highdissociation of plasma species at the wafer edge produces simpler (moreactive) etch species that are relatively high in fluorine content (theextreme example of such reactive species being free fluorine) andproduce low-carbon content polymer films that accumulate more slowly onphotoresist surfaces. At the wafer center, the effect of lowdissociation is most noticeable when etching extremely narrow openingsthrough a dielectric thin film. At the wafer center, the polymeraccumulates on the side walls of the narrow openings causing taperprofile angle, and eventually, as the opening depth increases, pinchesoff the opening and stops further etching of the opening before therequired depth is reached, a phenomenon referred to as etch stop.

These problems are exacerbated when attempting to increase the etch rateor improve profile by the expedient of increasing the process gas flowrate into the reactor chamber. Such an increase in gas flow rate doesnot solve the problem of non-uniform residency time radial distributionacross the wafer surface (and hence the non-uniform dissociation acrossthe wafer surface), and may even worsen the problem, thereby worseningthe etch rate or etch profile non-uniformity. One approach to improvingthe etch rate or etch profile at the wafer center might seem to beincreasing the process gas flow rate over the wafer center or decreasingit at the wafer periphery (or both). However, such a technique wouldfurther decrease the gas residency time (and dissociation) over thewafer center relative to the periphery, further worsening the etch rateor etch profile non-uniformity. Thus, there appears to be no solution tothe problem.

Another reason for such problems is the process gas content. We havefound that the problem arises with great severity when using particularcombinations of fluorocarbon or hydrocarbon etch process gases thatotherwise produce the best possible process results, such as (forexample) a process gas that has, for its etchant component, C4F6 and/orCH2F2. Another example can include CHF3 and/or CF4. These process gaseshave been found to produce desired results (with the exception of thetendency for etch stop discussed above) when etching such dielectricmaterials as silicon dioxide or silicon nitride or low dielectricconstant materials such as porous organo-silicate glass ornitrogen-doped silicon carbide, for example. It has seemed that the onlyway of avoiding center-low etch rate distribution or the related taperprofile or etch stop problems is to employ other (less desirable)process gas mixtures.

Another cause for the center-low etch rate distribution across the wafersurface arises in a particular type of capacitively coupled etchreactor. In the beginning, a capacitively coupled etch reactor employeda single RF power source coupled between the wafer and the overheadelectrode. In such a reactor, the etch rate could only be increased (toenhance productivity) by increasing the RF power. Such an increaseunfortunately increases the ion energy, causing more bombardment damageto photoresist and thereby reducing etch selectivity. This problem wascircumvented by introducing low frequency magnetic fields at the sidesof the chamber (in lieu of increasing the RF power) to improve the etchrate, in which case the reactor is called a magnetically enhancedreactive ion etch (MERIE) reactor. This approach was successful inimproving the etch rate (e.g., by a factor of 2 in some cases) withoutdamaging the photoresist or reducing the etch selectivity. It is feltthat the MERIE magnetic field boosts the etch rate by increasingionization. Recently, the RF source power has been decoupled from theion energy or photoresist bombardment damage by applying VHF sourcepower that contributes primarily (or almost exclusively) to ionizationwhile applying independently a low frequency (or HF frequency) biaspower that contributes primarily (or almost exclusively) to ion energy.This permits ionization and/or dissociation to be increased, withoutincreasing ion bombardment damage to photoresist, by increasing the VHFsource power without increasing the lower frequency bias power.Nevertheless, even with such a dual frequency approach for decouplingcontrol of dissociation and ion energy, MERIE magnets can be used. Theproblem is that the MERIE magnetic fields tend to have their greatestetch rate-enhancing effect nearest the wafer edge. This produces acenter-low etch rate distribution across the wafer surface, which hasseemed to be an unavoidable characteristic of MERIE reactors. Typically,the MERIE reactor also suffers from the effects (discussed above) of lowgas residency time over the wafer center, that causes center-low etchrate distribution. The relatively high dissociation achieved in such areactor, through the use of VHF source power and MERIE magnets, makesthe non-uniformity of the dissociation (due to non-uniform gas residencytime across the wafer) more critical.

SUMMARY OF THE INVENTION

A plasma etch process etches high aspect ratio openings in a dielectricfilm on a workpiece in a reactor having a ceiling electrode overlyingthe workpiece and an electrostatic chuck supporting the workpiece. Theprocess includes injecting a polymerizing etch process gas through anannular zone of gas injection orifices in the ceiling electrode, andevacuating gas from the reactor through a pumping annulus surrounding anedge of the workpiece. The high aspect ratio openings are etched in thedielectric film with etch species derived from the etch process gaswhile depositing a polymer derived from the etch process gas onto theworkpiece, by generating a plasma in the reactor by applying VHF sourcepower and/or HF and/or LF bias power to the electrodes at the ceilingand/or the electrostatic chuck. The process further includes slowing thedeposition rate of the polymer, minimizing etch stop and/or increasingetch rate in a region of the workpiece typically the center by injectingoxygen or nitrogen and/or high-fluorine containing gas through gasinjection orifice in the corresponding region of the ceiling electrode,and adjusting the flow rate of the oxygen or nitrogen and/orhigh-fluorine containing gas through the gas injection orifice tominimize the difference between etch depths and profiles at theworkpiece center and the workpiece periphery. The term high-fluorinecontaining gas refers to a fluorocarbon or fluorohydrocarbon gas of amolecular content with a high fluorine-to-carbon ratio. Further, tocounteract the etch profile to taper, diluent gas flow is increased inthe corresponding region. The adjustment is performed by increasing theoxygen or nitrogen and/or high-fluorine containing gas and/or diluentflow rate over time.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are side and top views of a plasma reactor havingfeatures for carrying out a process of the invention.

FIG. 1C depicts a gas flow splitter employed in the reactor of FIGS. 1Aand 1B.

FIGS. 2A and 2B depict center and edge etch profiles obtained in aconventional process and obtained in a process of the invention,respectively.

FIGS. 3 and 4 depict different gas distribution apparatus for thereactor of FIG. 1A for carrying out different embodiments of a processof the invention.

FIGS. 5A and 5B depict oxide and photoresist etch rate radialdistributions obtained in a first embodiment of the invention.

FIGS. 6A and 6B depict oxide and photoresist etch rate radialdistributions obtained in a second embodiment of the invention.

FIG. 7 is a graph depicting the effect of MERIE magnetic fields uponetch rate distribution.

FIG. 8 is a graph of gas distribution patterns in a first embodiment ofthe invention.

FIG. 9 is a graph of gas distribution patterns in a second embodiment ofthe invention.

FIGS. 10A, 10B and 10C depict successively improved etch ratedistributions obtained in accordance with successive steps for adjustingthe etch process in accordance with an aspect of the invention.

FIG. 11 is a block flow diagram of a first embodiment of a process ofthe invention.

FIG. 12 is a block flow diagram of a second embodiment of a process ofthe invention.

FIG. 13 illustrates a modified version of the reactor of FIG. 1A.

FIG. 14 is a block flow diagram of an etch process that can be performedin the reactor of FIG. 13.

FIG. 15 is a graph depicting a time-changing oxygen or nitrogen gas flowrate in accordance with one aspect of the process of FIG. 14.

FIGS. 16, 17, 18 and 19 are graphs depicting gas flow rates over time ofdifferent species in the center, inner and outer gas flow zones,respectively.

FIG. 20 is a graph of static radial distributions of different gasspecies in the reactor chamber in one implementation.

DETAILED DESCRIPTION OF THE INVENTION

The present invention solves the problem of low etch rate in a regiontypically at the center of the wafer that has plagued capacitivelycoupled plasma etch processes for etching dielectric thin films. Theinvention is based upon our discovery that the problem can be completelysolved without requiring any increase in etch process gas flow rate overthe wafer center. It is further based upon our discovery that removingor slowing deposition of polymer on sidewalls and/or bottom of narrowopenings at the wafer center during the etch process is an effectivesolution, rather than attempting to increase the etch gas flow rate atthe wafer center. Finally, the invention is based upon our discoverythat a gas such as oxygen or nitrogen which does not etch dielectricmaterial, but which does remove polymer, is an essential part of thissolution. The invention is realized by providing a novel independent gasinjection orifice or zone, for example, at the center of the overheadelectrode that is supplied with pure oxygen or nitrogen gas with a flowrate adjustment independent of the polymerizing etch process gas flow tothe inner/outer gas zones of the ceiling electrode/gas showerhead. Thepurpose of this new feature is to inject pure oxygen or nitrogenprimarily (or exclusively) onto the wafer center, without necessarilyhaving to alter the gas distribution of the etchant (fluorocarbon orfluorohydrocarbon) gases in the chamber. The result is that theadditional gas flow over the wafer center (i.e., the added oxygen ornitrogen gas), which would be expected to reduce etch rate at the wafercenter by reducing gas residency time, actually increases etch rate ashigh as desired, depending upon the oxygen or nitrogen gas flow rate tothe center. In fact it was discovered that the dielectric etch rate atthe wafer center can be increased to a level higher than any otherlocation on the wafer, if desired, by simply increasing the oxygen ornitrogen flow (influx) rate at the wafer center. Thus, the effect of theoxygen or nitrogen gas in suppressing polymer growth at the wafer centerduring etch (thereby solving the etch-stop problem) outweighs the effectof increased gas flow on residency time or dissociation. Anotherunexpected advantage is that the photoresist etch rate (caused by ionbombardment during the dielectric etch operation) can be made moreuniform by adjusting the oxygen flow rate over the wafer center.

In a situation where there is low etch rate, tapered profile or etchstop near the wafer edge or any annular section of the wafer compared toother regions, the principle of independent gas feed still applies. Inthis case, independent gas feed will be performed in the outer and/orintermediate zone. Although the following detailed description employsexamples having center low etch rate, tapered profile or etch stop,similar scenarios exist with low etch rate, tapered profile or etch stopnear the wafer edge or in any other sections of the wafer.

FIG. 1A depicts a capacitively coupled plasma reactor that includesfeatures for carrying out the process of the invention. The reactor ofFIG. 1A includes a chamber 100 defined by a cylindrical side wall 105supporting an overhead electrode 110. The overhead electrode 110 is bothan electrode and a gas distribution showerhead having an outer annularzone 115 of gas injection orifices 116 in the electrode bottom surface110 a fed from a common outer manifold 117 inside the electrode 110, andan inner annular zone of 120 of gas injection orifices 121 in theelectrode bottom surface 110 a fed from a common inner manifold 122inside the electrode 110.

An electrostatic chuck (ESC) 125 supports the semiconductor wafer 130that is to be etched. The ESC 125 has an insulating layer 126 containinga chucking electrode or grid 127 and a lower conductive base layer 129that may be cooled. The ESC surface supporting the wafer is about oneinch below the ceiling electrode bottom surface 110 a, which establishesa high aspect ratio for a large (300 mm) wafer diameter. A D.C. chuckvoltage supply 128 is connected to the ESC grid 127. Plasma bias poweris applied by a high frequency (HF) RF generator 135 and/or a lowfrequency (LF) RF generator 140 through an impedance match circuit 145through an isolation capacitor 146 to the ESC grid 127. Plasma sourcepower is applied by a very high frequency (VHF) RF generator 150 throughan impedance match element 155 to the ceiling electrode 110.

The ESC 125 and the side wall 105 define a pumping annulus 106 betweenthem through which gas is evacuated from the chamber interior by avacuum pump 107. A throttle valve 108 regulates the evacuation rate andchamber pressure.

In one type of such a reactor, the impedance match element 155 is acoaxial tuning stub. This type of reactor is disclosed in U.S. Pat. No.6,838,635 by Daniel Hoffman et al. and assigned to the present assignee.Preferably, the tuning stub has a resonant frequency near the frequencyof the VHF generator 150 which is near a resonant frequency formed byplasma in the chamber 100 and the ceiling electrode 110. For thispurpose, the ceiling electrode reactance may be tuned to provide aresonance with the plasma near the VHF generator frequency.

In another type of capacitively coupled reactor, the impedance matchelement 155 is a conventional circuit. In either type of reactor, etchperformance can be enhanced by magnetically enhanced reactive ion etch(MERIE) electromagnets 161, 162, 163, 164 (shown in FIG. 1B) disposedaround the sidewall 105 and driven by successively phased low frequencycurrents to produce a slowly rotating magnetic field in the chamber 100.The currents are provided by an MERIE current source 160. The sidewall105 may be formed of a non-magnetic conductor such as aluminum.

A process gas supply 170 furnishes a process gas that includes, as itsmain component, polymerizing etch gases (e.g., a fluorocarbon and/orfluorohydrocarbon gases) to a flow ratio controller (FRC) 175 whichapportions the gas flow to the inner and outer gas manifolds 122, 117 ofthe inner and outer gas orifices 120, 115 of the ceiling electrode 110.The FRC 175 is depicted in FIG. 1C and consists of a gas flow divider orsplitter 176 b and a pair of control valves 177, 178 coupling thesplitter 176 to the two manifolds 117, 122 respectively.

Conventionally, the problem of low etch rate or etch stop at the wafercenter was addressed by increasing process gas flow to the inner zone120 or decreasing gas flow at the outer zone 115. But this merely hadthe undesirable effect of decreasing dissociation at the wafer centerand was therefore not a solution to the problem. The problem is observedin the etch profile of a deep narrow opening depicted in FIG. 2A. It isdesired to form the same identical opening at both the wafer center(left side of FIG. 2A) and at the wafer periphery (right side of FIG.2A). However, as described above, the gas residency time and (hence) thedissociation are much greater at the wafer periphery, so that moreactive species (simpler compounds of fluorine) are present at the waferedge so that the polymer deposition is too slow to fill in the narrowopening before it is complete. The result is a top critical dimension(TCD) at the top of the opening and a bottom critical dimension at thebottom of the opening that are within the desired range, the openingbeing of the desired depth (right side of FIG. 2A). In contrast, at thewafer center (left side of FIG. 2A), the high carbon content of thepolymer deposited on the side wall of the high aspect ratio openingcauses the opening to be very narrow at its bottom, for a BCD that istoo small, and the hole depth to be insufficient, due to etch stop atthe wafer center.

The problem is solved by flowing pure oxygen (or nitrogen) gas to thewafer center through a center gas injection zone 180 shown in FIG. 1A.The center gas injection zone 180 may be a single gas injection orificeor many such orifices, in the center of the ceiling electrode 110. Thecenter gas injection zone 180 receives the oxygen (or nitrogen) gas froman oxygen (or nitrogen) gas supply 185 that is independent or separatefrom the polymerizing etch gas supply 170. A control valve 190 controlsthe flow rate of the oxygen (or nitrogen) gas to the center gasinjection zone 180. FIG. 2B depicts the successful results obtainedusing the center gas injection zone 180, in which the deep narrowopening at the wafer center (left side of FIG. 2B) has the approximatelysame BCD and depth as the narrow opening at the wafer periphery (rightside of FIG. 2B). The flow rate of the pure oxygen or nitrogen throughthe center gas injection zone 180 is adjusted (or increased) using thecontrol valve 190 until the BCD at the wafer center is about the same asthe BCD at the wafer edge. Thus, non-uniformities are eliminated (orreduced) in the invention. An additional advantage is the elimination ofover-etching near the wafer edge, which (prior to the present invention)was a necessary consequence of extending the etch process timesufficiently to gain a slight increase in BCD at the wafer center.

In one successful implementation, it was unnecessary to flow process gasto the outer zone 115, so that only the inner zone 120 and the centergas injection zone 180 were used.

In the implementation depicted in FIG. 3, some of the oxygen (ornitrogen) from the oxygen (or nitrogen) supply 185 may be divertedthrough a valve 200 to the inner gas zone 120. Alternatively, some ofthe etch process gas may be diverted from the inner manifold 122 to thecenter gas injection zone 180.

In the implementation of FIG. 4, some of the oxygen (or nitrogen) fromthe oxygen (or nitrogen) supply 185 may be diverted through a valve 205to the outer gas zone 115. Alternatively, some of the etch process gasmay be diverted from the outer manifold 117 to the center gas injectionzone 180.

Thus, in the implementation of FIG. 3 or FIG. 4, oxygen (or nitrogen)gas flow rate radial distribution can be broadened or narrowed, asdesired, by increasing or decreasing the oxygen (or nitrogen) gas flowrate to the inner and/or outer gas zones 120, 115.

FIG. 5A is a graph qualitatively comparing radial distributions ofdielectric etch rates obtained in plasma etch processes with and withoutthe invention. The results of FIG. 5A were obtained by etching adielectric thin film layer of silicon dioxide in a capacitively coupledplasma reactor of the type depicted in FIG. 1A. The curve labeled 300depicts a typical silicon dioxide etch rate as a function of radiallocation on the wafer in the case in which a polymerizing etch gas isfed through the inner zone gas injection orifices 120 with no oxygen gas(or any other gas) fed through the center gas injection zone 180. Thecurve 300 indicates that the etch rate is depressed at the wafer center,as expected in such a conventional capacitively coupled etch process.The curve labeled 305 depicts the oxide etch rate as a function ofradial location under the same process conditions in which the curve 300was obtained, with the addition of a modest flow rate of oxygen gas atthe center gas injection zone 180. The curve 305 indicates that theoxygen gas injected through the center gas injection zone 180 causes theetch rate at the wafer center to increase somewhat, although the etchrate remains somewhat depressed at the wafer center. The curve labeled310 depicts the oxide etch rate as a function of radial location underthe same process conditions but with a significantly higher oxygen gasflow rate through the center gas injection zone 180. The curve 310indicates that the higher oxygen flow rate through the center orifice issufficient to raise the etch rate at the wafer center to at least nearlyequal the etch rate near the wafer periphery, so that the etch ratedistribution is far more uniform. The curve 315 depicts the oxide etchrate as a function of radial location under the same process conditionsexcept that the oxygen gas flow rate through the center gas injectionzone 180 is increased even further (above that used to obtain the curve310). The curve 315 indicates that the etch rate radial distribution iscenter high when the oxygen gas flow rate through the center gasinjection zone is very high. These results indicate that the user mayincrease the oxygen gas flow rate through the center zone 180 to anideal level at which the most uniform etch rate radial distribution isattained, corresponding to the curve 310. The uniform dielectric etchrate distribution of the curve 310 corresponds to the ideal etch profiledistribution depicted in FIG. 2B in which the bottom critical dimension(BCD) at the wafer center is nearly as great as the BCD at the waferedge.

The dielectric plasma etch process is performed with a photoresist maskoverlying the dielectric film, and the photoresist mask is etch by ionbombardment in the plasma (simultaneously with the etching of thedielectric thin film layer), which removes some of the photoresistduring the etch step. As long as this removal merely reduces thephotoresist mask thickness without removing the mask, it is acceptable.However, because partial photoresist removal can affect TCD and BCD, itis desirable that the photoresist etch rate have a radial distributionthat is as uniform as possible. FIG. 5B is a graph depicting thephotoresist etch rate distribution obtained in the process conditionscorresponding the dielectric etch rate curves 300, 305, 310 and 315 ofFIG. 5A. The curves labeled 300 a, 305 a, 310 a and 315 a of FIG. 5Bdepict the photoresist etch rate distributions obtained in the etchsteps represented by the dielectric etch rate curves 300, 305, 310 and315, respectively, of FIG. 5A. FIG. 5B shows that the photoresist etchrate distribution is much more responsive to the oxygen flow ratethrough the center gas zone 180. Specifically, an ideal oxygen flow ratethrough the center zone 180 corresponds to the uniform dielectric etchrate distribution represented by the curve 310 of FIG. 5A), and to thecenter high photoresist etch rate represented by the curve 310 a of FIG.5B. A higher oxygen gas flow rate through the center gas zone 180produces a slightly center high dielectric etch rate represented by thecurve 315 of FIG. 5, and to the much more center high photoresist etchrate represented by the curve 315 a of FIG. 5B. The results illustratedin FIGS. 5A and 5B show that the response of the etch rate distributionto the flow rate oxygen gas through the center gas zone 180 is verysensitive, so that the center zone oxygen gas flow rate should beadjusted with great care to obtain the most uniform dielectric etch ratedistribution without undue non-uniformity in the photoresist etch rate.

A less sensitive response by the etch rate distribution to oxygen (ornitrogen) gas flow over the wafer center may be obtained in anotherembodiment of the invention in which the entire gas distribution patternis shifted radially outwardly. Specifically, the oxygen gas is fedthrough the inner gas zone 120 while the polymerizing etch process gasis fed through the outer gas zone 115. In this case, very little (or no)oxygen gas is fed through the center gas injection zone 180. This may beaccomplished by employing the embodiment of FIG. 3, in which the onlygas fed to the inner zone is oxygen from the oxygen gas supply 185 whilethe only gas fed to the outer zone is the etch process gas (e.g., afluorocarbon or fluorohydrocarbon gas) from the etch process gas supply170. For this purpose, the FRC 175 shuts off the flow of etch gas to theinner gas zone 120, and the center zone gas flow is likewise turned offat the valve 190. This embodiment retains the same approach as thepreferred embodiment of FIG. 1A in that oxygen gas flow is directed tothe wafer center to reduce the deposition of polymer at the wafercenter, while the polymerizing etch process gas is directed to the outerportion of the wafer. However, in this alternative embodiment, theoxygen gas distribution is not as concentrated at the wafer center. Theresulting response of the dielectric etch rate distribution, illustratedin FIG. 6A, is a more moderate behavior, in which the successivedielectric etch rate distributions 300 b, 305 b, 310 b, 315 b arisingfrom successively higher oxygen gas flow rates exhibit more gradualincrease in dielectric etch rate at the wafer center. Similarly, in FIG.6B the corresponding photoresist etch rate distributions 300 c, 305 c,310 c, 315 c arising from the successively higher oxygen gas flow ratesexhibit a more gradual increase in dielectric etch rate at the wafercenter, with only the highest oxygen gas flow rate resulting in a centerhigh photoresist etch rate distribution (the curve 315 c of FIG. 6B).

The sensitivity of the etch process to adjustments in the oxygen flowrate to the wafer center may be adjusted between the highly sensitivebehavior of FIG. 5A and the moderate behavior of FIG. 6A by combiningthe features of the two embodiments. Specifically, some of the oxygengas may be directed to the center gas zone 180 and the remainderdirected to the inner gas zone 120, while some of the polymerizing etchprocess gas may be directed to the outer gas zone 115 and the remainderdirected to the inner gas zone 120. The apportionment of these gasesbetween the alternative paths determines how closely the process followsthe sensitive behavior of FIG. 5A or the moderate behavior of FIG. 6A.

FIG. 7 depicts how the pronounced center-low etch rate distributions ofthe curves 300 and 300 a of FIGS. 5A and 6A are affected by the MERIEfields of the reactor of FIG. 1A. Without the MERIE fields, the etchrate is low and the etch rate distribution is moderately center low (thecurve 400 of FIG. 7) because of the greater process gas residency timeat the wafer periphery referred to above. Application of the MERIE fieldraises the overall etch rate while at the same time increasing thenon-uniformity (center-low shape) of the etch rate distribution (thecurve 405 of FIG. 7), due to the proximity of the MERIE magnets to thewafer periphery. The center low etch rate distribution of the curve 405is corrected in the manner described above by feeding pure oxygen gas tothe center gas injection zone 180.

FIG. 8 is a graph illustrating the radial distribution of gasconcentration in the embodiment of FIG. 1A in which no gas is fed to theouter zone 115. In FIG. 8, the oxygen gas distribution (labeled “Oxygen”in FIG. 8) is concentrated at the wafer center while the polymerizingetch process gas distribution (labeled “process gas” in FIG. 8) isfairly uniform but is somewhat center low and edge low. FIG. 9 is agraph illustrating the radial distribution of gas concentration in theembodiment of FIG. 1A in which the oxygen gas is fed to the center zone180, while polymerizing etch process gas is fed to both the inner zone120 and the outer zone 115 independently. FIG. 9 shows that differentgas distributions are obtained over the wafer center, middle andperiphery because each of the gas injection zones 115, 120, 180 has adifferent gas distribution pattern. These patterns are labeled in FIG.9, respectively, “Center Zone Pattern”, “Inner Zone Pattern” and “OuterZone Pattern”. Applying different gas flow rates to the three zones 115,120, 180 enables the gas distribution of the oxygen gas and the etchprocess gas to be optimized to provide the most uniform etch ratedistribution. For example, a center low etch rate distribution (depictedin FIG. 10A) may be improved to a distribution having a center peak andan edge peak (depicted in FIG. 10B), by increasing the oxygen gas flowrate at the center gas zone 180. The etch rate distribution of FIG. 10Bmay have a dip or depression over the wafer middle, which may belessened by adjusting the proportion of polymerizing etch process gasflow at the inner and outer zones 120, 115 to obtain the more uniformdistribution depicted in FIG. 10C.

The polymerizing etch process gases that can be employed in the processof the invention can be a mixture of fluorocarbon and hydrofluorocarbongases such as C4F6, CH2F2. This mixture may be combined with O2 or N2and Ar. Other polymerizing etch species that can be employed in similarmixtures include C4F8, C2F4, CHF3, CF4 and CH3F. With such gases, theprocess of the invention can be applied to the etching of silicondioxide thin films and silicon nitride thin films, low dielectricconstant thin films, for example.

FIG. 11 illustrates one process of the invention employing the reactorof FIG. 1A and using only the center and inner gas injection zones 180,120. A polymerizing etch process gas is fed through the inner gasinjection zone 120 of the ceiling electrode 110 (block 500 of FIG. 11).Oxygen gas is fed through the center gas injection zone 180 of theceiling electrode 110 (block 505 of FIG. 11). VHF plasma source power(30 MHz to 400 MHz) is applied to the ceiling electrode 110 (block 510of FIG. 11). RF plasma bias power is applied to the ESC grid 127 (block515 of FIG. 11). The RF bias power may be either one or a combination ofHF power (3 MHz to 30 MHz) and LF power (0.03 MHz to 3 MHz). If MERIEmagnets are present, then the MERIE magnetic field is adjusted toprovide a desired (enhanced) overall etch rate (block 520 of FIG. 11).The flow rate of the oxygen gas to the center gas zone 180 is adjusted,usually by increasing it, to optimize or maximize the uniformity of theradial distribution of the dielectric etch rate (block 525 of FIG. 11).

In an alternative embodiment that employs the apparatus of FIG. 3, someoxygen gas may be diverted from the center gas injection zone 180 andfed through the inner zone 120 (block 530 of FIG. 11). In this case, theratio between the oxygen and etch gas flow rates in the inner zone maybe adjusted to further enhance the uniformity of the dielectric etchrate radial distribution (block 535 of FIG. 11). In another alternativeembodiment, some of the polymerizing etch process gas may be divertedfrom the inner gas zone 120 to be fed through the center gas zone 180(block 540 of FIG. 11). This alternative embodiment may be applied toplasma etching of silicon nitride, oxide or low dielectric constantfilms, for example.

FIG. 12 illustrates a process of the invention involving all three gasinjection zones 115, 120, 180. It includes the steps of blocks 500through 530 of FIG. 11. In addition, it includes the following steps:introducing a polymerizing etch process gas through the outer gasinjection zone 115 (block 501 of FIG. 12); diverting some of the oxygengas from the center zone 180 to the outer zone 115 (block 531);adjusting the inner and outer gas zone flow rates to improve etch rateuniformity across the wafer (block 560 of FIG. 12); and, adjusting theoxygen-to-etch process gas ratios in each of the center, inner and outergas injection zones 180, 120, 115 to improve the dielectric etch rateradial distribution uniformity (block 565 of FIG. 12).

In order to carry out the foregoing processes, a process controller 610individually controls the chucking voltage supply 128, the vacuum pump107 and valve 108, the RF power levels of the RF generators 135, 140,150, each of the valves 177, 178 of the flow ratio controller 175, thevalve 190, the valve 200 in the embodiment of FIG. 3, and the valve 205in the embodiment of FIG. 4. The process controller 610 may beprogrammable in that instructions for carrying out the process of FIG.11 or FIG. 12 may be stored in the controller 610 for sequentialexecution by the controller 610.

Time and Spatial Modulation of Gas Content:

In general, etch rate decreases, etch stop occurs or etch profilebecomes tapered with time as the etching progresses deeper into a highaspect ratio trench or a high aspect ratio contact opening. The problemmost often is manifested nearer the wafer center, although it ispossible for this problem to occur in other annular zones of the wafer,corresponding to the inner and outer gas injection zones 120, 115.Typically, the etch rate decrease or the etch profile tapering increaseoccurs at a higher rate at the wafer center and at a somewhat lower rateat an intermediate annular zone of the wafer (e.g., underlying the innergas injection zone 120), and may be negligible at the wafer periphery(corresponding to the outer gas injection zone 115). However, thedistribution of etch rate or etch stop and etch profile tapering maydiffer from this typical pattern. This problem is solved in the presentinvention as follows: In those zones in which this problem occurs, theflow rates of any one or all of (a) high-fluorine content etch gas, (b)diluent (inert) gas, (c) O2, or (d) N2, are increased faster than highcarbon content etch gas. The high-fluorine content gas increases theetch rate and may forestall etch stop. The term high-fluorine contentgas refers to a fluorocarbon or fluorohydrocarbon gas with a molecularcontent of a high fluorine-to-carbon ratio. The term high-carbon contentgas refers to a fluorocarbon or fluorohydrocarbon gas with a molecularcontent of a high carbon-to-fluorine ratio. The diluent gas reduces etchprofile tapering, albeit at the expense of some loss of etch rate. TheO2 or N2 gases slow down the deposition of polymer, preventing etch stopand enhancing etch rate. In the typical case, etch profile becomes moretapered with time (etch depth) near wafer center, and therefore inaccordance with the invention the flow rates of any one or all of thefollowing are increased over time relative to the flow rate of highcarbon content etch gas: (a) high fluorine content etch gas, (b) diluentgas, (c) O2 (or N2). In this particular example, such an increase isperformed in the inner zone at a higher rate than in other zones. Asanother example, if the etch profile becomes more tapered over time inany particular annular zone of the wafer (which may be other than thecenter zone), then in that particular zone, the flow rates of any one orall of the following are increased over time relative to the flow rateof high carbon content etch gas: (a) high fluorine content etch gas, (b)diluent gas, (c) O2 (or N2). This increase is performed in theparticular zone at a higher rate than in other zones if the problem ismost severe in that particular zone. A similar increase may be performedin one or more of the other zones as needed, but at a lesser rate,depending upon the relative severity of the problem in the differentzones.

In carrying out the foregoing method, the choice of gases whose flowrates are selected for a faster increase over time depends upon theparticular problem or sets of problem occurring in the zone of interest:For etch stop, the need is to slow down the polymer sidewall/bottomdeposition rate (by increasing the oxygen flow rate), or increase theetch rate (by increasing the high fluorine content etch gas flow rate).For etch profile tapering, tapering may be reduced by increasing theflow of diluent (inert) gas in the zone of interest, and/or byincreasing the flow rate of high fluorine content etch gas, and/or byincreasing the flow rate of the other gases (high fluorine content etchgas and oxygen or nitrogen).

The foregoing method may be carried out to different degrees indifferent zones simultaneously. For example, etch profile tapering maybe most pronounced in the center zone of the wafer, and less pronouncedin the inner annular zone and nearly absent in the outer zone. In such acase, the flow rates of some or all of the foregoing gases (i.e., (a)high fluorine content etch gas, (b) diluent gas, (c) oxygen, (d)nitrogen) may be increased over time relative to the flow rate of highcarbon content etch gas, but at a faster rate of increase in the centerzone and at a somewhat reduced rate of increase in the inner zone (forexample). Thus, different rates of differential increase in gas flowrates may be carried out simultaneously in different gas injection zonesoverlying the different concentric wafer zones of interest (e.g.,center, inner, outer, etc.). For example, etch stop may be thepredominant problem in one of the concentric zones while etch profiletapering may be the predominant problem in another concentric zone. Insuch a case, oxygen (or nitrogen) gas flow rate is given the highestrate of increase (relative to all process gases) in the one zone (toretard polymer sidewall/bottom deposition), while diluent gas is giventhe highest rate of increase in the other zone (to reduce etch profiletapering). In both of these zones, however, the flow rates of the otherprocess gases may also be increased over time, but at lower rates.

In a preferred embodiment, all gas flow rates are increased over time tocounteract the tendency across the entire wafer for the etch rate todecrease over time (or equivalently with the depth of the etchedopenings). That is, the flow rates of high fluorine content etch gas,high carbon content etch gas, oxygen (or nitrogen) and diluent (inert)gases are all increased. This flow rate increase is preferably carriedout in all concentric gas injection zones, but to different degrees ineach zone in proportion to the etch rate decline in the each zone. Forexample, the gas flow rate of each process gas may have the greatestrate of increase in the center zone and have the least rate of increasein the outer zone.

FIG. 13 depicts a reactor for carrying out the foregoing methods. Thereactor of FIG. 13 includes the structural elements of the reactor ofFIG. 1A and has, in addition, an array of individually controllable gasflow valves 600 individually controlling gas flow rates between eachindividual gas supply 605, 606, 607, 608 and each gas flow zone 115,120, 180 in the ceiling electrode 110. In the embodiment of FIG. 13,there are four individual gas supplies 605-608 and three gas flow zones115, 120, 180, and therefore the array of valves 600 has twelve valves.The gas supply 605 furnishes pure oxygen or nitrogen gas. The gas supply606 furnishes a hydrocarbon or hydrofluorocarbon gas (or a mixture ofthe two) of a species having a relatively high fluorine content, such asCH2F2 for example, that (in general) exhibits a relatively highdielectric etch rate and a relatively low polymer deposition rate. Thegas supply 607 furnishes a hydrocarbon or hydrofluorocarbon gas (or amixture of the two) of a species having a relatively high carboncontent, such as C4F6, for example, that (in general) exhibits arelatively high polymer deposition rate and a relatively low dielectricetch rate. The gas supply 608 furnishes a diluent gas, such as argon orxenon, for example. A controller 610 governs each of the valves 600 inan individual manner, and is capable of changing any one of the valves600 as a predetermined function of time during the etch process. Thus,the controller 610 is capable of realizing many different radialdistributions of the four process gases over the wafer and is furthercapable of changing any such distribution over time during an etchprocess. For this purpose, the controller 610 is programmable to performprecise predetermined control of each of the valves 600 during the etchprocess. High Fluorine containing gas is defined as a fluorocarbon orfluorohydrocarbon gas with high Fluorine to Carbon ratio. High Carboncontaining gas is defined as a fluorocarbon or fluorohydrocarbon gaswith high Carbon to Fluorine ratio.

The reactor of FIG. 13 is versatile and can be employed to carry out theprocess illustrated in FIG. 14. For this purpose, the controller 610 maybe programmed with a set of instructions for controlling the valves 600to perform the process of FIG. 14. The process of FIG. 14 includes theprocess steps of blocks 500, 510 and 515 of FIG. 11 for establishing aplasma for etching a dielectric film on the wafer. In addition, theprocess of FIG. 14 includes the process step of block 570 in which theoxygen (or nitrogen) gas flow rate is incrementally increased over timeduring the etching of the dielectric film. Such an increase may beimplemented by the controller 610 as a succession of incremental stepsin the oxygen (or nitrogen) gas flow rate over time, as depicted in FIG.15. This increase may be carried out in all gas flow zones of theceiling electrode 110 (i.e., the outer zone 115, the inner zone 120 andthe center zone 180). Alternatively, this increase may be carried out inthe center zone 180 exclusively.

In order to counteract the tendency of the etch profile to taper(narrow) as the etch depth increases, diluent gas flow may be increasedby the controller 610 (block 575 of FIG. 14) to a gas injection zoneoverlying a workpiece zone experiencing etch profile tapering, such asthe center or inner gas injection zones. Alternatively, diluent gas maybe employed to slow down a high etch rate at the wafer periphery byincreasing its flow rate to a gas injection zone overlying a portion ofthe workpiece experiencing high etch rate, such as the outer gasinjection zone. This step may be carried out by the controller 610 as aconstant pattern in which diluent gas flow to the outer gas flow zone115 is higher than in the other gas flow zones 120, 180. Alternatively,this step may be carried out by the controller 610 steadily increasingthe diluent gas flow to the center or inner gas flow zones 120, 180 overtime during the etch process.

As a further measure to counteract the center-low dielectric etch ratedistribution, the ratio of the flow rates of the two etch process gases(the high-carbon content etch gas and the high-fluorine content etchgas) may be set by the controller 610 to different values in the innerand outer gas flow zones 120, 115 of the ceiling electrode 110 (block580 of FIG. 14). In one example, the gas composition furnished to theinner gas zone 120 may have more high-fluorine content etch gas and lesshigh-carbon content etch gas, while the gas composition furnished to theouter gas zone 115 may have more high-carbon content etch gas and lesshigh-fluorine content etch gas. Such a pattern would favor less polymerformation at the wafer center, thus reducing the tendency of the processto produce undersized bottom critical dimension at the wafer center oretch stop.

FIGS. 16, 17, 18 and 19 are contemporaneous diagrams of gas flow ratesof different species in the three gas flow zones 115, 120, 180 of theceiling electrode 110, in accordance with one example for performing aprocess having time-changing gas flow rates. In one zone, which is inalmost all cases the center zone 180, etch rate decreases over time oractually stops. To solve this problem, the oxygen flow rate to this zoneis increased over time by the controller 610 during the etch process, asshown in the graph of FIG. 16. In another zone experiencing etch stop orpolymer pinch-off, which is most likely the inner zone 120, the tendencyfor etch stop or polymer pinch-off of narrow openings is countered byincreasing over time the ratio of the high-fluorine containing etch gasrelative to the high-carbon containing etch gas, as shown in FIG. 17.Also, diluent gas flow may be increased over time in the zoneexperiencing the greatest etch profile tapering, which is in most casesthe inner zone 120, to reduce etch profile tapering or etch stop as theetch depth increases as shown in FIG. 18. In the zone having the highest(or increasing) etch rate, most likely the outer zone 115, the high etchrate (e.g., at the wafer periphery) is balanced by increasing over timethe ratio of high-carbon containing etch gas relative to high-fluorinecontaining etch gas, as shown in FIG. 19.

FIG. 20 is a graph depicting one example of gas flow distribution withinthe reactor chamber at a selected height over the wafer for severaldifferent process gas species. The pattern of FIG. 20 may be static forthe entire etch process, or may be a snap shot of a succession ofchanging patterns in a time-modulated process such as that of FIGS.16-19. In the gas flow distribution of FIG. 20, oxygen gas is narrowlyconfined over the wafer center. The high-fluorine containing etch gas isconcentrated mainly in the intermediate zone of the wafer, while thehigh-carbon containing etch gas is concentrated mainly near the waferperiphery. In addition, a diluent gas is also concentrated near thewafer periphery in order to moderate the dielectric etch rate at thewafer periphery.

While the invention has been described in detail by specific referencesto preferred embodiments, it is understood that variations andmodifications thereof may be made without departing from the true spiritand scope of the invention.

1. A plasma etch process for etching high aspect ratio openings in a dielectric film on a workpiece in a reactor having a ceiling electrode overlying the workpiece and an electrostatic chuck supporting the workpiece, comprising: injecting a first polymerizing etch process gas through at least a first selected one of plural concentric zones of gas injection orifices in the ceiling electrode; evacuating gas from said reactor through a pumping annulus surrounding an edge of the workpiece; coupling RF power into the reactor so as to etch high aspect ratio openings in the dielectric film with etch species derived from the etch process gas while depositing a polymer derived from the etch process gas onto the workpiece; and injecting oxygen or nitrogen gas through at least some respective ones of the plural concentric gas injection zones of the ceiling electrode at respective polymer management gas flow rates, apportioning said respective polymer management gas flow rates in accordance with a first distribution, and increasing over time said respective polymer management gas flow rates at respective polymer management gas flow rates of increase during the etch process; injecting an inert diluent gas through at least some of the plural concentric gas injection zones of the ceiling electrode at respective diluent gas flow rates, and apportioning said respective diluent gas flow rates in accordance with a second distribution different from said first distribution.
 2. The process of claim 1 wherein the oxygen or nitrogen gas is injected predominantly or exclusively through said second selected gas injection zone.
 3. The process of claim 1 further comprising apportioning said respective polymer management gas flow rates of increase in accordance with said first distribution.
 4. The process of claim 1 further comprising increasing said respective diluent gas flow rates over time at respective diluent gas flow rates of increase.
 5. The process of claim 4 further comprising apportioning said respective diluent gas flow rates of increase in accordance with said second distribution.
 6. The process of claim 1 wherein said first polymerizing etch process gas has a first carbon-to-fluorine ratio, said process further comprising: injecting a second polymerizing etch process gas through at least a fourth selected one of the plural concentric gas injection zones of said ceiling, said second etch process gas having a second carbon-to-fluorine ratio greater than said first carbon-to-fluorine ratio of said first etch process gas, said first and fourth gas injection zones overlying corresponding concentric zones of said wafer experiencing, respectively, lower and higher etch rates during said process.
 7. The process of claim 6 comprising injecting both said first and second process gases through each of said first and fourth gas injection zones simultaneously, at different ratios of flow rates of said first and second process gases in different ones of said first and fourth gas injection zones, the ratio of the flow rates of said first and second process gases being greater in said first gas injection zone than in said fourth gas injection zone, whereby to flow more fluorine-rich etch process gas and less carbon-rich process gas into a zone of said workpiece having a lower etch rate than other zones.
 8. The process of claim 7 wherein said fourth gas injection zone is a center zone of said ceiling and said first gas injection zone is an annular zone radially outside of said center zone.
 9. The process of claim 1 wherein the step of injecting an etch process gas comprises injecting first and second etch process gases having, respectively, high and low fluorine-to-carbon ratios, through respective ones of the gas injection zones of said ceiling, and apportioning the respective flow rates of said first and second etch process gases in the different gas injection zones in accordance with an etch distribution among corresponding zones of said workpiece of at least one of (a) etch profile tapering, (b) etch rate, (c) etch stop.
 10. The process of claim 1 wherein said etch process gas comprises at least one or both of (a) a fluoro-carbon gas, (b) a fluoro-hydrocarbon gas.
 11. The process of claim 7 further comprising increasing said ratio with time during the etch process.
 12. The process of claim 3 further comprising increasing said respective diluent gas flow rates over time at respective diluent gas flow rates of increase.
 13. The process of claim 12 further comprising apportioning said respective diluent gas flow rates of increase in accordance with said etch profile distribution.
 14. The process of claim 1 wherein: said first distribution comprises a distribution among concentric zones of said workpiece corresponding to said plural concentric zones of gas injection in said ceiling electrode of etch rate or etch stop; and said second distribution comprises a distribution among concentric zones of said workpiece corresponding to said plural concentric zones of gas injection in said ceiling electrode of etch profile tapering.
 15. A plasma etch process for etching high aspect ratio openings in a dielectric film on a workpiece in a reactor having a ceiling electrode overlying the workpiece and an electrostatic chuck supporting the workpiece, comprising: injecting a first polymerizing etch process gas through at least a first selected one of plural concentric zones of gas injection orifices in the ceiling electrode; evacuating gas from said reactor through a pumping annulus surrounding an edge of the workpiece; coupling RF power into said reactor so as to etch high aspect ratio openings in the dielectric film with etch species derived from the etch process gas while depositing a polymer derived from the etch process gas onto the workpiece; and injecting oxygen or nitrogen gas through at least some respective ones of the plural concentric gas injection zones of the ceiling electrode at respective polymer management gas flow rates and apportioning said respective polymer management gas flow rates in accordance with a first distribution; injecting an inert diluent gas through the plural concentric gas injection zones of the ceiling electrode at respective diluent gas flow rates, and apportioning said respective diluent gas flow rates in accordance with a second distribution different from said first distribution and increasing over time said respective diluent gas flow rates at respective diluent gas flow rates of increase during the etch process.
 16. The process of claim 15 further comprising apportioning said respective diluent gas flow rates of increase in accordance with said second distribution.
 17. The process of claim 15 further comprising increasing said respective polymer management gas flow rates over time at respective polymer management gas flow rates of increase.
 18. The process of claim 17 further comprising apportioning said respective polymer management gas flow rates of increase in accordance with said first distribution.
 19. The process of claim 1 wherein the step of injecting an etch process gas comprises injecting first and second etch process gases having, respectively, high and low fluorine-to-carbon ratios, through respective ones of the gas injection zones of said ceiling, and apportioning the respective flow rates of said first and second etch process gases in the different gas injection zones in accordance with an etch distribution among corresponding zones of said workpiece of at least one of (a) etch profile tapering, (b) etch rate, (c) etch stop. 